Patent US20020136667 - Silicon nitride window for microsampling device and method of construction - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More »Sign inPatentsA silicon nitride cuvette window for a microsampling device and method of construction are provided. The sample to be analyzed is drawn into the cuvette of the microsampling device. The silicon nitride window permits optical measurements to be made on analytes contained within the cuvette....http://www.google.com/patents/US20020136667?utm_source=gb-gplus-sharePatent US20020136667 - Silicon nitride window for microsampling device and method of constructionAdvanced Patent SearchPublication numberUS20020136667 A1Publication typeApplicationApplication numberUS 09/816,497Publication dateSep 26, 2002Filing dateMar 26, 2001Priority dateMar 26, 2001Also published asUS6896850Publication number09816497, 816497, US 2002/0136667 A1, US 2002/136667 A1, US 20020136667 A1, US 20020136667A1, US 2002136667 A1, US 2002136667A1, US-A1-20020136667, US-A1-2002136667, US2002/0136667A1, US2002/136667A1, US20020136667 A1, US20020136667A1, US2002136667 A1, US2002136667A1InventorsKumar Subramanian, Wilson Smart, Asikeh KanuOriginal AssigneeKumar Subramanian, Wilson Smart, Kanu Asikeh S.Export CitationBiBTeX, EndNote, RefManReferenced by (119), Classifications (13), Legal Events (7) External Links: USPTO, USPTO Assignment, EspacenetSilicon nitride window for microsampling device and method of construction
BRIEF DESCRIPTION OF THE DRAWINGS [0016] [0016]FIG. 1A is a section view of a silicon wafer prior to initial patterning and etching; [0017] [0017]FIG. 1B is a section view of the silicon wafer of FIG. 1A subsequent to etching of the top surface to define the sampling chamber; [0018] [0018]FIG. 1C is a section view of the silicon wafer of FIG. 1B showing a silicon nitride film layer deposited on the top of the etched wafer; and [0019] [0019]FIG. 1D is a section view of the silicon wafer of FIG. 1C with deposited silicon nitride film subsequent to etching the bottom of the wafer to remove the silicon in the window region and expose the bottom of the silicon nitride film. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0020] The present invention comprises a process of constructing a cuvette window for a microsampling device for the measurement of biological materials from biological fluids. The microsampling device is preferably fabricated from a silicon wafer and is generally described in U.S. Pat. No. 5,801,057, by Smart et al, the subject matter of which is hereby incorporated by reference in its entirety into this disclosure. The present invention has a transparent window on the silicon wafer to facilitate optical readouts of the specimen within the cuvette. Optical quality silicon nitride film is deposited on the silicon wafer and silicon removed such that a portion of the film is exposed on both sides. [0021] The microsampling device or microsampler has a very fine, short needle through which blood or other body fluids can be drawn into a small sampling chamber or microcuvette. Preferably, the microcuvette has a volume of less than one microliter. The microcuvette has at least one optical window and a vent to allow air to escape as the microcuvette fills when blood or other fluids are drawn in through the needle. The needle preferably has an outer diameter of 100 to 200 micrometers. [0022] The microsampler is constructed using well-established silicon microfabrication technology which has been in wide use for decades for the manufacture of electronic integrated circuits and more recently has been extended to micromechanical devices. The microsampler is made by a series of very precise photolithographic, etching and very precise microdeposition steps performed on a silicon wafer. A large number of the present microsampling device can be made at the same time on a single wafer, followed by dicing to separate the individual devices, each of which is commonly referred to as a die or chip in the microelectronics industry. [0023] The cuvette window comprises a silicon nitride film formed on the microsampler chamber of the microsampler device with the window being exposed on two surfaces. The method of construction comprises providing a silicon wafer having a top surface and a bottom surface, etching a patterned depression in the top surface of the silicon wafer thereby defining the microsampler chamber, depositing a silicon nitride film on the top surface of the silicon wafer, and etching a patterned depression in the bottom surface of the silicon wafer such that at least a portion of the silicon nitride film deposited in the microsampler chamber becomes exposed on both surfaces. [0024] The stages or steps of the cuvette window fabrication process are illustrated in FIGS. 1A-1D, and are described in further detail below. The microsampling device may have one or two cuvette windows, depending on the detection method used. A two window device suitable is for analyze detection using transmittance photometry can be fabricated from two wafers where the cuvettes and windows are bonded together in registration. Alternately, the second window can be provided separately in the device holder. A microsampling device with only one cuvette window is used where the methods of choice for the detection of the analyte may be fluorescence, luminescence, or reflectance photometry. In this case, a blank silicon wafer is bonded to the wafer containing the cuvettes and windows, and the individual devices then separated. [0025] In the present example, a silicon wafer about 500 micrometers thick having one surface polished forms silicon substrate 10 a of the microsampling device as illustrated in FIG. 1A. Silicon wafers of this type are commercially available and are commonly used in the integrated circuit industry in thickness of 500 to 1000 micrometers. [0026] Silicon substrate 10 a is first patterned and plasma etched on the top polished surface to form the vent, cuvette, and needle bore pattern required for operation of the microsampling device. FIG. 1B illustrates the microsampler chamber or cuvette in silicon substrate 10 b subsequent to the plasma etching. As illustrated in FIG. 1C, low stress silicon nitride film 12 c is then deposited onto the top surface of silicon substrate 10 c. The silicon nitride film has a thickness of approximately 0.01 to 5 micrometers. [0027] As illustrated in FIG. 1D, the bottom of the silicon wafer is then etched with a potassium hydroxide wet etchant to remove silicon and expose the bottom of the silicon nitride window. Industrial Applicability [0028] It will be apparent to those skilled in the art that the objects of this invention have been achieved as described hereinbefore by providing a silicon nitride cuvette window for a microsampling device. The silicon nitride window provides at least three advantages. First, the cuvette window can be fabricated by standard semiconductor processing methods. Second, the cuvette window is substantially transparent in the desired wavelengths. Finally, the cuvette window withstands normal handling in course of using the microsampling device. Conclusion [0029] The foregoing description of the preferred embodiments of the subject invention have been presented for purposes of illustration and description and for a better understanding of the invention. It is not intended to be exhaustive nor to limit the invention to the precise form disclosed. Modifications and variations are possible without departing from the concept of the invention. For example, additional coatings, such as antireflection coatings, can be added on top of the silicon nitride window to improve optical properties. Therefore, the scope of the invention is to be determined by the terminology of the following claims and the legal equivalents thereof. Referenced byCiting PatentFiling datePublication dateApplicantTitleUS7224448Nov 16, 2004May 29, 2007Agilent Technologies, Inc.Apparatus and methods for evaluating an optical property of a liquid sampleUS7277167Sep 13, 2005Oct 2, 2007Agilent Technologies, Inc.Modular cuvettes and methods for use thereofUS7648468Dec 31, 2002Jan 19, 2010Pelikon Technologies, Inc.Method and apparatus for penetrating tissueUS7666149Oct 28, 2002Feb 23, 2010Peliken Technologies, Inc.Cassette of lancet cartridges for sampling bloodUS7674232Mar 9, 2010Pelikan Technologies, Inc.Method and apparatus for penetrating tissueUS7682318Jun 12, 2002Mar 23, 2010Pelikan Technologies, Inc.Blood sampling apparatus and methodUS7699791Jun 12, 2002Apr 20, 2010Pelikan Technologies, Inc.Method and apparatus for improving success rate of blood yield from a fingerstickUS7708701Dec 18, 2002May 4, 2010Pelikan Technologies, Inc.Method and apparatus for a multi-use body fluid sampling deviceUS7713214Dec 18, 2002May 11, 2010Pelikan Technologies, Inc.Method and apparatus for a multi-use body fluid sampling device with optical analyte sensingUS7717863Dec 31, 2002May 18, 2010Pelikan Technologies, Inc.Method and apparatus for penetrating tissueUS7731729Feb 13, 2007Jun 8, 2010Pelikan Technologies, Inc.Method and apparatus for penetrating tissueUS7749174Jun 12, 2002Jul 6, 2010Pelikan Technologies, Inc.Method and apparatus for lancet launching device intergrated onto a blood-sampling cartridgeUS7780631Aug 24, 2010Pelikan Technologies, Inc.Apparatus and method for penetration with shaft having a sensor for sensing penetration depthUS7822454Oct 26, 2010Pelikan Technologies, Inc.Fluid sampling device with improved analyte detecting member configurationUS7833171Nov 16, 2010Pelikan Technologies, Inc.Method and apparatus for penetrating tissueUS7850621Jun 7, 2004Dec 14, 2010Pelikan Technologies, Inc.Method and apparatus for body fluid sampling and analyte sensingUS7850622Dec 22, 2005Dec 14, 2010Pelikan Technologies, Inc.Tissue penetration deviceUS7862520Jun 20, 2008Jan 4, 2011Pelikan Technologies, Inc.Body fluid sampling module with a continuous compression tissue interface surfaceUS7874994Oct 16, 2006Jan 25, 2011Pelikan Technologies, Inc.Method and apparatus for penetrating tissueUS7875047Jan 25, 2007Jan 25, 2011Pelikan Technologies, Inc.Method and apparatus for a multi-use body fluid sampling device with sterility barrier releaseUS7892183Feb 22, 2011Pelikan Technologies, Inc.Method and apparatus for body fluid sampling and analyte sensingUS7892185Sep 30, 2008Feb 22, 2011Pelikan Technologies, Inc.Method and apparatus for body fluid sampling and analyte sensingUS7901362Dec 31, 2002Mar 8, 2011Pelikan Technologies, Inc.Method and apparatus for penetrating tissueUS7901365Mar 8, 2011Pelikan Technologies, Inc.Method and apparatus for penetrating tissueUS7909775Mar 22, 2011Pelikan Technologies, Inc.Method and apparatus for lancet launching device integrated onto a blood-sampling cartridgeUS7909777Sep 29, 2006Mar 22, 2011Pelikan Technologies, IncMethod and apparatus for penetrating tissueUS7909778Apr 20, 2007Mar 22, 2011Pelikan Technologies, Inc.Method and apparatus for penetrating tissueUS7914465Feb 8, 2007Mar 29, 2011Pelikan Technologies, Inc.Method and apparatus for penetrating tissueUS7938787May 10, 2011Pelikan Technologies, Inc.Method and apparatus for penetrating tissueUS7976476Jul 12, 2011Pelikan Technologies, Inc.Device and method for variable speed lancetUS7981055Dec 22, 2005Jul 19, 2011Pelikan Technologies, Inc.Tissue penetration deviceUS7981056Jun 18, 2007Jul 19, 2011Pelikan Technologies, Inc.Methods and apparatus for lancet actuationUS7988644 *Aug 2, 2011Pelikan Technologies, Inc.Method and apparatus for a multi-use body fluid sampling device with sterility barrier releaseUS7988645Aug 2, 2011Pelikan Technologies, Inc.Self optimizing lancing device with adaptation means to temporal variations in cutaneous propertiesUS8007446Aug 30, 2011Pelikan Technologies, Inc.Method and apparatus for penetrating tissueUS8016774Dec 22, 2005Sep 13, 2011Pelikan Technologies, Inc.Tissue penetration deviceUS8062231Nov 22, 2011Pelikan Technologies, Inc.Method and apparatus for penetrating tissueUS8079960Oct 10, 2006Dec 20, 2011Pelikan Technologies, Inc.Methods and apparatus for lancet actuationUS8123700Jun 26, 2007Feb 28, 2012Pelikan Technologies, Inc.Method and apparatus for lancet launching device integrated onto a blood-sampling cartridgeUS8157748Jan 10, 2008Apr 17, 2012Pelikan Technologies, Inc.Methods and apparatus for lancet actuationUS8197421Jul 16, 2007Jun 12, 2012Pelikan Technologies, Inc.Method and apparatus for penetrating tissueUS8197423Dec 14, 2010Jun 12, 2012Pelikan Technologies, Inc.Method and apparatus for penetrating tissueUS8202231Apr 23, 2007Jun 19, 2012Sanofi-Aventis Deutschland GmbhMethod and apparatus for penetrating tissueUS8206317Dec 22, 2005Jun 26, 2012Sanofi-Aventis Deutschland GmbhTissue penetration deviceUS8206319Jun 26, 2012Sanofi-Aventis Deutschland GmbhTissue penetration deviceUS8211037Jul 3, 2012Pelikan Technologies, Inc.Tissue penetration deviceUS8216154Jul 10, 2012Sanofi-Aventis Deutschland GmbhTissue penetration deviceUS8221334Jul 17, 2012Sanofi-Aventis Deutschland GmbhMethod and apparatus for penetrating tissueUS8231832Jul 31, 2012Intuity Medical, Inc.Analyte concentration detection devices and methodsUS8235915Dec 18, 2008Aug 7, 2012Sanofi-Aventis Deutschland GmbhMethod and apparatus for penetrating tissueUS8251921Jun 10, 2010Aug 28, 2012Sanofi-Aventis Deutschland GmbhMethod and apparatus for body fluid sampling and analyte sensingUS8262614Jun 1, 2004Sep 11, 2012Pelikan Technologies, Inc.Method and apparatus for fluid injectionUS8267870May 30, 2003Sep 18, 2012Sanofi-Aventis Deutschland GmbhMethod and apparatus for body fluid sampling with hybrid actuationUS8282576Sep 29, 2004Oct 9, 2012Sanofi-Aventis Deutschland GmbhMethod and apparatus for an improved sample capture deviceUS8282577Oct 9, 2012Sanofi-Aventis Deutschland GmbhMethod and apparatus for lancet launching device integrated onto a blood-sampling cartridgeUS8296918Aug 23, 2010Oct 30, 2012Sanofi-Aventis Deutschland GmbhMethod of manufacturing a fluid sampling device with improved analyte detecting member configurationUS8337421Dec 16, 2008Dec 25, 2012Sanofi-Aventis Deutschland GmbhTissue penetration deviceUS8360991Dec 23, 2005Jan 29, 2013Sanofi-Aventis Deutschland GmbhTissue penetration deviceUS8360992Nov 25, 2008Jan 29, 2013Sanofi-Aventis Deutschland GmbhMethod and apparatus for penetrating tissueUS8360993Jan 29, 2013Intuity Medical, Inc.Method for body fluid sample extractionUS8360994Jan 29, 2013Intuity Medical, Inc.Arrangement for body fluid sample extractionUS8366637Feb 5, 2013Sanofi-Aventis Deutschland GmbhMethod and apparatus for penetrating tissueUS8372016Feb 12, 2013Sanofi-Aventis Deutschland GmbhMethod and apparatus for body fluid sampling and analyte sensingUS8382681Sep 29, 2006Feb 26, 2013Intuity Medical, Inc.Fully integrated wearable or handheld monitorUS8382682Feb 26, 2013Sanofi-Aventis Deutschland GmbhMethod and apparatus for penetrating tissueUS8382683Feb 26, 2013Sanofi-Aventis Deutschland GmbhTissue penetration deviceUS8388551May 27, 2008Mar 5, 2013Sanofi-Aventis Deutschland GmbhMethod and apparatus for multi-use body fluid sampling device with sterility barrier releaseUS8403864May 1, 2006Mar 26, 2013Sanofi-Aventis Deutschland GmbhMethod and apparatus for penetrating tissueUS8414503Apr 9, 2013Sanofi-Aventis Deutschland GmbhMethods and apparatus for lancet actuationUS8430828Jan 26, 2007Apr 30, 2013Sanofi-Aventis Deutschland GmbhMethod and apparatus for a multi-use body fluid sampling device with sterility barrier releaseUS8435190Jan 19, 2007May 7, 2013Sanofi-Aventis Deutschland GmbhMethod and apparatus for penetrating tissueUS8439872Apr 26, 2010May 14, 2013Sanofi-Aventis Deutschland GmbhApparatus and method for penetration with shaft having a sensor for sensing penetration depthUS8491500Apr 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a rotatable cartridge with multiple lancing elements and testing meansUS8652831Mar 26, 2008Feb 18, 2014Sanofi-Aventis Deutschland GmbhMethod and apparatus for analyte measurement test timeUS8668656Dec 31, 2004Mar 11, 2014Sanofi-Aventis Deutschland GmbhMethod and apparatus for improving fluidic flow and sample captureUS8679033Jun 16, 2011Mar 25, 2014Sanofi-Aventis Deutschland GmbhTissue penetration deviceUS8690796Sep 29, 2006Apr 8, 2014Sanofi-Aventis Deutschland GmbhMethod and apparatus for penetrating tissueUS8702624Jan 29, 2010Apr 22, 2014Sanofi-Aventis Deutschland GmbhAnalyte measurement device with a single shot actuatorUS8721671Jul 6, 2005May 13, 2014Sanofi-Aventis Deutschland GmbhElectric lancet actuatorUS8784335Jul 25, 2008Jul 22, 2014Sanofi-Aventis Deutschland GmbhBody fluid sampling device with a capacitive sensorUS8795201Jan 28, 2013Aug 5, 2014Intuity Medical, Inc.Catalysts for body fluid sample extractionUS8801631Sep 30, 2005Aug 12, 2014Intuity Medical, Inc.Devices and 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FreemanMethod and apparatus for penetrating tissueUS8919605Nov 30, 2010Dec 30, 2014Intuity Medical, Inc.Calibration material delivery devices and methodsUS8945910Jun 19, 2012Feb 3, 2015Sanofi-Aventis Deutschland GmbhMethod and apparatus for an improved sample capture deviceUS8965476Apr 18, 2011Feb 24, 2015Sanofi-Aventis Deutschland GmbhTissue penetration deviceUS8969097Feb 28, 2011Mar 3, 2015Intuity Medical, Inc.Analyte detection devices and methods with hematocrit-volume correction and feedback controlUS9034639Jun 26, 2012May 19, 2015Sanofi-Aventis Deutschland GmbhMethod and apparatus using optical techniques to measure analyte levelsUS9060723Jul 29, 2014Jun 23, 2015Intuity Medical, Inc.Body fluid sampling arrangementsUS9072842Jul 31, 2013Jul 7, 2015Sanofi-Aventis Deutschland GmbhMethod and apparatus for penetrating tissueUS9089294Jan 16, 2014Jul 28, 2015Sanofi-Aventis Deutschland GmbhAnalyte measurement device with a single shot actuatorUS9089678May 21, 2012Jul 28, 2015Sanofi-Aventis Deutschland GmbhMethod and apparatus for penetrating tissueUS9095292Jul 30, 2012Aug 4, 2015Intuity Medical, Inc.Analyte concentration detection devices and methodsUS9144401Dec 12, 2005Sep 29, 2015Sanofi-Aventis Deutschland GmbhLow pain penetrating memberUS9186468Jan 14, 2014Nov 17, 2015Sanofi-Aventis Deutschland GmbhMethod and apparatus for penetrating tissueUS9226699Nov 9, 2010Jan 5, 2016Sanofi-Aventis Deutschland GmbhBody fluid sampling module with a continuous compression tissue interface surfaceUS9248267Jul 18, 2013Feb 2, 2016Sanofi-Aventis Deustchland GmbhTissue penetration deviceUS9261476Apr 1, 2014Feb 16, 2016Sanofi SaPrintable hydrogel for biosensorsUS9314194Jan 11, 2007Apr 19, 2016Sanofi-Aventis Deutschland GmbhTissue penetration deviceUS9339612Dec 16, 2008May 17, 2016Sanofi-Aventis Deutschland GmbhTissue penetration deviceUS9351680Oct 14, 2004May 31, 2016Sanofi-Aventis Deutschland GmbhMethod and apparatus for a variable user interfaceUS9366636Feb 4, 2015Jun 14, 2016Intuity Medical, Inc.Analyte detection devices and methods with hematocrit/volume correction and feedback controlUS20060103849 *Nov 16, 2004May 18, 2006Zhenghua JiApparatus and methods for evaluating an optical property of a liquid sampleUS20060178689 *Dec 23, 2005Aug 10, 2006Dominique FreemanTissue penetration deviceUS20070081159 *Oct 11, 2005Apr 12, 2007Giffin Kristin MApparatus and methods for evaluating an optical property of a liquid sampleUS20070201021 *Sep 13, 2005Aug 30, 2007Schembri Carol TModular cuvettes and methods for use thereof* Cited by examinerClassifications U.S. Classification73/61.71, 422/82.05, 436/181International ClassificationG01N21/03, B81B3/00Cooperative ClassificationG01N21/03, B81B3/0035, Y10T436/25875, Y10T436/25625, G01N2021/0346, Y10T436/25European ClassificationG01N21/03, B81B3/00KLegal EventsDateCodeEventDescriptionDec 9, 2002ASAssignmentOwner name: KUMETRIX, INC., CALIFORNIAFree format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SUBRAMANIAN, KUMAR;REEL/FRAME:013561/0381Effective date: 19970221Dec 13, 2002ASAssignmentOwner name: KUMETRIX, INC., CALIFORNIAFree format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SMART, WILSON;KANU, ASIKEH;REEL/FRAME:013572/0363Effective date: 20010522Sep 10, 2003ASAssignmentOwner name: KUMETRIX, INC., CALIFORNIAFree format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SUBRAMANIAN, KUMAR;REEL/FRAME:014497/0881Effective date: 20030812Aug 27, 2008FPAYFee paymentYear of fee payment: 4Jan 7, 2013REMIMaintenance fee reminder mailedMay 24, 2013LAPSLapse for failure to pay maintenance feesJul 16, 2013FPExpired due to failure to pay maintenance feeEffective date: 20130524RotateOriginal ImageGoogle Home - Sitemap - USPTO Bulk Downloads - Privacy Policy - Terms of Service - About Google Patents - Send FeedbackData provided by IFI CLAIMS Patent Services
Patent US20020136667 - Silicon nitride window for microsampling device and method of construction - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More »Sign inPatentsA silicon nitride cuvette window for a microsampling device and method of construction are provided. The sample to be analyzed is drawn into the cuvette of the microsampling device. The silicon nitride window permits optical measurements to be made on analytes contained within the cuvette....http://www.google.com/patents/US20020136667?utm_source=gb-gplus-sharePatent US20020136667 - Silicon nitride window for microsampling device and method of constructionAdvanced Patent SearchPublication numberUS20020136667 A1Publication typeApplicationApplication numberUS 09/816,497Publication dateSep 26, 2002Filing dateMar 26, 2001Priority dateMar 26, 2001Also published asUS6896850Publication number09816497, 816497, US 2002/0136667 A1, US 2002/136667 A1, US 20020136667 A1, US 20020136667A1, US 2002136667 A1, US 2002136667A1, US-A1-20020136667, US-A1-2002136667, US2002/0136667A1, US2002/136667A1, US20020136667 A1, US20020136667A1, US2002136667 A1, US2002136667A1InventorsKumar Subramanian, Wilson Smart, Asikeh KanuOriginal AssigneeKumar Subramanian, Wilson Smart, Kanu Asikeh S.Export CitationBiBTeX, EndNote, RefManReferenced by (119), Classifications (13), Legal Events (7) External Links: USPTO, USPTO Assignment, EspacenetSilicon nitride window for microsampling device and method of construction
BRIEF DESCRIPTION OF THE DRAWINGS [0016] [0016]FIG. 1A is a section view of a silicon wafer prior to initial patterning and etching; [0017] [0017]FIG. 1B is a section view of the silicon wafer of FIG. 1A subsequent to etching of the top surface to define the sampling chamber; [0018] [0018]FIG. 1C is a section view of the silicon wafer of FIG. 1B showing a silicon nitride film layer deposited on the top of the etched wafer; and [0019] [0019]FIG. 1D is a section view of the silicon wafer of FIG. 1C with deposited silicon nitride film subsequent to etching the bottom of the wafer to remove the silicon in the window region and expose the bottom of the silicon nitride film. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0020] The present invention comprises a process of constructing a cuvette window for a microsampling device for the measurement of biological materials from biological fluids. The microsampling device is preferably fabricated from a silicon wafer and is generally described in U.S. Pat. No. 5,801,057, by Smart et al, the subject matter of which is hereby incorporated by reference in its entirety into this disclosure. The present invention has a transparent window on the silicon wafer to facilitate optical readouts of the specimen within the cuvette. Optical quality silicon nitride film is deposited on the silicon wafer and silicon removed such that a portion of the film is exposed on both sides. [0021] The microsampling device or microsampler has a very fine, short needle through which blood or other body fluids can be drawn into a small sampling chamber or microcuvette. Preferably, the microcuvette has a volume of less than one microliter. The microcuvette has at least one optical window and a vent to allow air to escape as the microcuvette fills when blood or other fluids are drawn in through the needle. The needle preferably has an outer diameter of 100 to 200 micrometers. [0022] The microsampler is constructed using well-established silicon microfabrication technology which has been in wide use for decades for the manufacture of electronic integrated circuits and more recently has been extended to micromechanical devices. The microsampler is made by a series of very precise photolithographic, etching and very precise microdeposition steps performed on a silicon wafer. A large number of the present microsampling device can be made at the same time on a single wafer, followed by dicing to separate the individual devices, each of which is commonly referred to as a die or chip in the microelectronics industry. [0023] The cuvette window comprises a silicon nitride film formed on the microsampler chamber of the microsampler device with the window being exposed on two surfaces. The method of construction comprises providing a silicon wafer having a top surface and a bottom surface, etching a patterned depression in the top surface of the silicon wafer thereby defining the microsampler chamber, depositing a silicon nitride film on the top surface of the silicon wafer, and etching a patterned depression in the bottom surface of the silicon wafer such that at least a portion of the silicon nitride film deposited in the microsampler chamber becomes exposed on both surfaces. [0024] The stages or steps of the cuvette window fabrication process are illustrated in FIGS. 1A-1D, and are described in further detail below. The microsampling device may have one or two cuvette windows, depending on the detection method used. A two window device suitable is for analyze detection using transmittance photometry can be fabricated from two wafers where the cuvettes and windows are bonded together in registration. Alternately, the second window can be provided separately in the device holder. A microsampling device with only one cuvette window is used where the methods of choice for the detection of the analyte may be fluorescence, luminescence, or reflectance photometry. In this case, a blank silicon wafer is bonded to the wafer containing the cuvettes and windows, and the individual devices then separated. [0025] In the present example, a silicon wafer about 500 micrometers thick having one surface polished forms silicon substrate 10 a of the microsampling device as illustrated in FIG. 1A. Silicon wafers of this type are commercially available and are commonly used in the integrated circuit industry in thickness of 500 to 1000 micrometers. [0026] Silicon substrate 10 a is first patterned and plasma etched on the top polished surface to form the vent, cuvette, and needle bore pattern required for operation of the microsampling device. FIG. 1B illustrates the microsampler chamber or cuvette in silicon substrate 10 b subsequent to the plasma etching. As illustrated in FIG. 1C, low stress silicon nitride film 12 c is then deposited onto the top surface of silicon substrate 10 c. The silicon nitride film has a thickness of approximately 0.01 to 5 micrometers. [0027] As illustrated in FIG. 1D, the bottom of the silicon wafer is then etched with a potassium hydroxide wet etchant to remove silicon and expose the bottom of the silicon nitride window. Industrial Applicability [0028] It will be apparent to those skilled in the art that the objects of this invention have been achieved as described hereinbefore by providing a silicon nitride cuvette window for a microsampling device. The silicon nitride window provides at least three advantages. First, the cuvette window can be fabricated by standard semiconductor processing methods. Second, the cuvette window is substantially transparent in the desired wavelengths. Finally, the cuvette window withstands normal handling in course of using the microsampling device. Conclusion [0029] The foregoing description of the preferred embodiments of the subject invention have been presented for purposes of illustration and description and for a better understanding of the invention. It is not intended to be exhaustive nor to limit the invention to the precise form disclosed. Modifications and variations are possible without departing from the concept of the invention. For example, additional coatings, such as antireflection coatings, can be added on top of the silicon nitride window to improve optical properties. Therefore, the scope of the invention is to be determined by the terminology of the following claims and the legal equivalents thereof. 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