Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
| sum_dtts
stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
0
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.03125
|
RecipeC0
|
WaferB0
| 10
|
2023-01-01 01:19:32.272
|
1
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.068263
|
RecipeC0
|
WaferB0
| 10
|
2023-01-01 01:19:32.272
|
2
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.998871
|
RecipeC0
|
WaferB0
| 10
|
2023-01-01 01:19:32.272
|
3
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 693.075212
|
RecipeC0
|
WaferB0
| 10
|
2023-01-01 01:19:32.272
|
4
|
lotA0
|
MFCGFlow_STEP_MEAN
| 74.995839
|
RecipeC0
|
WaferB0
| 10
|
2023-01-01 01:19:32.272
|
5
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.050699
|
RecipeC0
|
WaferB0
| 10
|
2023-01-01 01:19:32.272
|
6
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB0
| 10
|
2023-01-01 01:19:32.272
|
7
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.079901
|
RecipeC0
|
WaferB0
| 10
|
2023-01-01 01:19:32.272
|
8
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.042968
|
RecipeC0
|
WaferB0
| 10
|
2023-01-01 01:19:32.272
|
9
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0.002235
|
RecipeC0
|
WaferB0
| 10
|
2023-01-01 01:19:32.272
|
10
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.970492
|
RecipeC0
|
WaferB0
| 10
|
2023-01-01 01:19:32.272
|
11
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 6
|
RecipeC0
|
WaferB0
| 7
|
2023-01-01 01:19:37.269
|
12
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.975098
|
RecipeC0
|
WaferB0
| 7
|
2023-01-01 01:19:37.269
|
13
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 160.400389
|
RecipeC0
|
WaferB0
| 7
|
2023-01-01 01:19:37.269
|
14
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -2.416992
|
RecipeC0
|
WaferB0
| 8
|
2023-01-01 01:19:39.279
|
15
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.997071
|
RecipeC0
|
WaferB0
| 8
|
2023-01-01 01:19:39.279
|
16
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.970984
|
RecipeC0
|
WaferB1
| 10
|
2023-01-01 01:20:47.457
|
17
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.935338
|
RecipeC0
|
WaferB1
| 10
|
2023-01-01 01:20:47.457
|
18
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC0
|
WaferB1
| 10
|
2023-01-01 01:20:47.457
|
19
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.070509
|
RecipeC0
|
WaferB1
| 10
|
2023-01-01 01:20:47.457
|
20
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.055338
|
RecipeC0
|
WaferB1
| 10
|
2023-01-01 01:20:47.457
|
21
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 684.538296
|
RecipeC0
|
WaferB1
| 10
|
2023-01-01 01:20:47.457
|
22
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.06765
|
RecipeC0
|
WaferB1
| 10
|
2023-01-01 01:20:47.457
|
23
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.998991
|
RecipeC0
|
WaferB1
| 10
|
2023-01-01 01:20:47.457
|
24
|
lotA0
|
MFCGFlow_STEP_MEAN
| 74.99871
|
RecipeC0
|
WaferB1
| 10
|
2023-01-01 01:20:47.457
|
25
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.032446
|
RecipeC0
|
WaferB1
| 10
|
2023-01-01 01:20:47.457
|
26
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC0
|
WaferB1
| 10
|
2023-01-01 01:20:47.457
|
27
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 693.89649
|
RecipeC0
|
WaferB1
| 12
|
2023-01-01 01:20:48.267
|
28
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.976562
|
RecipeC0
|
WaferB1
| 7
|
2023-01-01 01:20:53.267
|
29
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 44.912111
|
RecipeC0
|
WaferB1
| 7
|
2023-01-01 01:20:53.267
|
30
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC0
|
WaferB1
| 7
|
2023-01-01 01:20:53.267
|
31
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -2.636719
|
RecipeC0
|
WaferB1
| 8
|
2023-01-01 01:20:54.366
|
32
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC0
|
WaferB1
| 8
|
2023-01-01 01:20:54.366
|
33
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 3.955078
|
RecipeC0
|
WaferB2
| 9
|
2023-01-01 01:21:02.266
|
34
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.063698
|
RecipeC0
|
WaferB2
| 10
|
2023-01-01 01:22:03.274
|
35
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 689.890975
|
RecipeC0
|
WaferB2
| 10
|
2023-01-01 01:22:03.274
|
36
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.06714
|
RecipeC0
|
WaferB2
| 10
|
2023-01-01 01:22:03.274
|
37
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.995389
|
RecipeC0
|
WaferB2
| 10
|
2023-01-01 01:22:03.274
|
38
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB2
| 10
|
2023-01-01 01:22:03.274
|
39
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.987705
|
RecipeC0
|
WaferB2
| 10
|
2023-01-01 01:22:03.274
|
40
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.056682
|
RecipeC0
|
WaferB2
| 10
|
2023-01-01 01:22:03.274
|
41
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.055176
|
RecipeC0
|
WaferB2
| 10
|
2023-01-01 01:22:03.274
|
42
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC0
|
WaferB2
| 10
|
2023-01-01 01:22:03.274
|
43
|
lotA0
|
MFCGFlow_STEP_MEAN
| 74.992968
|
RecipeC0
|
WaferB2
| 10
|
2023-01-01 01:22:03.274
|
44
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC0
|
WaferB2
| 10
|
2023-01-01 01:22:03.274
|
45
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 82.089846
|
RecipeC0
|
WaferB2
| 7
|
2023-01-01 01:22:08.264
|
46
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC0
|
WaferB2
| 7
|
2023-01-01 01:22:08.264
|
47
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.95752
|
RecipeC0
|
WaferB2
| 7
|
2023-01-01 01:22:08.264
|
48
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -2.856445
|
RecipeC0
|
WaferB2
| 8
|
2023-01-01 01:22:10.263
|
49
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.993409
|
RecipeC0
|
WaferB2
| 8
|
2023-01-01 01:22:10.263
|
50
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0.002235
|
RecipeC0
|
WaferB3
| 10
|
2023-01-01 01:23:18.273
|
51
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.055338
|
RecipeC0
|
WaferB3
| 10
|
2023-01-01 01:23:18.273
|
52
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.074567
|
RecipeC0
|
WaferB3
| 10
|
2023-01-01 01:23:18.273
|
53
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.998511
|
RecipeC0
|
WaferB3
| 10
|
2023-01-01 01:23:18.273
|
54
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.068263
|
RecipeC0
|
WaferB3
| 10
|
2023-01-01 01:23:18.273
|
55
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.055175
|
RecipeC0
|
WaferB3
| 10
|
2023-01-01 01:23:18.273
|
56
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC0
|
WaferB3
| 10
|
2023-01-01 01:23:18.273
|
57
|
lotA0
|
MFCGFlow_STEP_MEAN
| 75.001581
|
RecipeC0
|
WaferB3
| 10
|
2023-01-01 01:23:18.273
|
58
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.972459
|
RecipeC0
|
WaferB3
| 10
|
2023-01-01 01:23:18.273
|
59
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 661.290503
|
RecipeC0
|
WaferB3
| 10
|
2023-01-01 01:23:18.273
|
60
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB3
| 10
|
2023-01-01 01:23:18.273
|
61
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 115.224607
|
RecipeC0
|
WaferB3
| 7
|
2023-01-01 01:23:23.261
|
62
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.995605
|
RecipeC0
|
WaferB3
| 7
|
2023-01-01 01:23:23.261
|
63
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB3
| 7
|
2023-01-01 01:23:23.261
|
64
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC0
|
WaferB3
| 8
|
2023-01-01 01:23:25.261
|
65
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.076172
|
RecipeC0
|
WaferB3
| 8
|
2023-01-01 01:23:25.261
|
66
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.989746
|
RecipeC0
|
WaferB4
| 8
|
2023-01-01 01:23:35.710
|
67
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 3.515625
|
RecipeC0
|
WaferB4
| 8
|
2023-01-01 01:23:35.710
|
68
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB4
| 10
|
2023-01-01 01:24:36.298
|
69
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 674.452482
|
RecipeC0
|
WaferB4
| 10
|
2023-01-01 01:24:36.298
|
70
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.075001
|
RecipeC0
|
WaferB4
| 10
|
2023-01-01 01:24:36.298
|
71
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC0
|
WaferB4
| 10
|
2023-01-01 01:24:36.298
|
72
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.029754
|
RecipeC0
|
WaferB4
| 10
|
2023-01-01 01:24:36.298
|
73
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.056884
|
RecipeC0
|
WaferB4
| 10
|
2023-01-01 01:24:36.298
|
74
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.079902
|
RecipeC0
|
WaferB4
| 10
|
2023-01-01 01:24:36.298
|
75
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.997911
|
RecipeC0
|
WaferB4
| 10
|
2023-01-01 01:24:36.298
|
76
|
lotA0
|
MFCGFlow_STEP_MEAN
| 74.992968
|
RecipeC0
|
WaferB4
| 10
|
2023-01-01 01:24:36.298
|
77
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0.006823
|
RecipeC0
|
WaferB4
| 10
|
2023-01-01 01:24:36.298
|
78
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.951311
|
RecipeC0
|
WaferB4
| 10
|
2023-01-01 01:24:36.298
|
79
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.020508
|
RecipeC0
|
WaferB4
| 7
|
2023-01-01 01:24:41.268
|
80
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 95.273439
|
RecipeC0
|
WaferB4
| 7
|
2023-01-01 01:24:41.268
|
81
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB4
| 7
|
2023-01-01 01:24:41.268
|
82
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.011719
|
RecipeC0
|
WaferB4
| 8
|
2023-01-01 01:24:43.268
|
83
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.076172
|
RecipeC0
|
WaferB4
| 8
|
2023-01-01 01:24:43.268
|
84
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 3.515625
|
RecipeC0
|
WaferB5
| 7
|
2023-01-01 01:24:53.267
|
85
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC0
|
WaferB5
| 7
|
2023-01-01 01:24:53.267
|
86
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.055338
|
RecipeC0
|
WaferB5
| 10
|
2023-01-01 01:25:54.345
|
87
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.061524
|
RecipeC0
|
WaferB5
| 10
|
2023-01-01 01:25:54.345
|
88
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 662.306284
|
RecipeC0
|
WaferB5
| 10
|
2023-01-01 01:25:54.345
|
89
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.044514
|
RecipeC0
|
WaferB5
| 10
|
2023-01-01 01:25:54.345
|
90
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB5
| 10
|
2023-01-01 01:25:54.345
|
91
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.06377
|
RecipeC0
|
WaferB5
| 10
|
2023-01-01 01:25:54.345
|
92
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC0
|
WaferB5
| 10
|
2023-01-01 01:25:54.345
|
93
|
lotA0
|
MFCGFlow_STEP_MEAN
| 74.99871
|
RecipeC0
|
WaferB5
| 10
|
2023-01-01 01:25:54.345
|
94
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.998991
|
RecipeC0
|
WaferB5
| 10
|
2023-01-01 01:25:54.345
|
95
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.948852
|
RecipeC0
|
WaferB5
| 10
|
2023-01-01 01:25:54.345
|
96
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.03125
|
RecipeC0
|
WaferB5
| 10
|
2023-01-01 01:25:54.345
|
97
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 82.529298
|
RecipeC0
|
WaferB5
| 7
|
2023-01-01 01:25:59.265
|
98
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB5
| 7
|
2023-01-01 01:25:59.265
|
99
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.975098
|
RecipeC0
|
WaferB5
| 7
|
2023-01-01 01:25:59.265
|
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