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2023-11-11 04:12:35
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RecipeC0
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WaferB5
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101
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lotA0
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2023-01-01 01:26:01.265
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102
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB6
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2023-01-01 01:26:11.265
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103
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lotA0
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UPC1-Flow_STEP_MEAN
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WaferB6
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2023-01-01 01:26:11.265
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104
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lotA0
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RecipeC0
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WaferB6
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2023-01-01 01:27:12.275
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105
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lotA0
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MFCJFlow_STEP_MEAN
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RecipeC0
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WaferB6
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2023-01-01 01:27:12.275
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106
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lotA0
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UPC1-Flow_STEP_MEAN
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2023-01-01 01:27:12.275
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107
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lotA0
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WaferB6
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108
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lotA0
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109
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lotA0
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110
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lotA0
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MFCKFlow_STEP_MEAN
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RecipeC0
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WaferB6
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2023-01-01 01:27:12.275
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111
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lotA0
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MFC2Flow_STEP_MEAN
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RecipeC0
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WaferB6
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2023-01-01 01:27:12.275
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112
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lotA0
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MFC5Flow_STEP_MEAN
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RecipeC0
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WaferB6
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2023-01-01 01:27:12.275
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113
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lotA0
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MFCNFlow_STEP_MEAN
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RecipeC0
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WaferB6
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2023-01-01 01:27:12.275
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114
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lotA0
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MFCXFlow_STEP_MEAN
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RecipeC0
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WaferB6
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2023-01-01 01:27:12.275
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115
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lotA0
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ThrottleValveAngle_STEP_MEAN
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RecipeC0
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WaferB6
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2023-01-01 01:27:17.262
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116
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB6
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2023-01-01 01:27:17.262
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117
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB6
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2023-01-01 01:27:17.262
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118
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB6
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2023-01-01 01:27:19.262
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119
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB6
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2023-01-01 01:27:19.262
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120
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:27:29.262
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121
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:27:29.262
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122
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lotA0
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MFC2Flow_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:30.269
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123
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lotA0
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MFC5Flow_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:30.269
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124
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:30.269
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125
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lotA0
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MFCJFlow_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:30.269
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126
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lotA0
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ThrottleValveAngle_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:30.269
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127
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lotA0
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MFCNFlow_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:30.269
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128
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lotA0
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MFCEFlow_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:30.269
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129
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lotA0
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MFCXFlow_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:30.269
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130
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lotA0
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MFCKFlow_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:30.269
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131
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:30.269
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132
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lotA0
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MFCGFlow_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:30.269
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133
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:35.259
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134
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lotA0
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ThrottleValveAngle_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:35.259
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135
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:35.259
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136
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
|
WaferB7
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2023-01-01 01:28:37.259
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137
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB7
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2023-01-01 01:28:37.259
|
138
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB8
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2023-01-01 01:28:47.269
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139
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB8
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2023-01-01 01:28:47.269
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140
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
|
WaferB8
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2023-01-01 01:29:48.266
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141
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lotA0
|
ThrottleValveAngle_STEP_MEAN
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RecipeC0
|
WaferB8
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2023-01-01 01:29:48.266
|
142
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lotA0
|
MFCKFlow_STEP_MEAN
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RecipeC0
|
WaferB8
| 10
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2023-01-01 01:29:48.266
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143
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lotA0
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MFCNFlow_STEP_MEAN
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RecipeC0
|
WaferB8
| 10
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2023-01-01 01:29:48.266
|
144
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lotA0
|
MFCJFlow_STEP_MEAN
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RecipeC0
|
WaferB8
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2023-01-01 01:29:48.266
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145
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lotA0
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MFCXFlow_STEP_MEAN
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RecipeC0
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WaferB8
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2023-01-01 01:29:48.266
|
146
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lotA0
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MFC2Flow_STEP_MEAN
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RecipeC0
|
WaferB8
| 10
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2023-01-01 01:29:48.266
|
147
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lotA0
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MFCEFlow_STEP_MEAN
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RecipeC0
|
WaferB8
| 10
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2023-01-01 01:29:48.266
|
148
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lotA0
|
MFC5Flow_STEP_MEAN
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RecipeC0
|
WaferB8
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2023-01-01 01:29:48.266
|
149
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lotA0
|
Pressure100TorrManometer_STEP_MEAN
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RecipeC0
|
WaferB8
| 10
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2023-01-01 01:29:48.266
|
150
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lotA0
|
MFCGFlow_STEP_MEAN
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RecipeC0
|
WaferB8
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2023-01-01 01:29:48.266
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151
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lotA0
|
ThrottleValveAngle_STEP_MEAN
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RecipeC0
|
WaferB8
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2023-01-01 01:29:54.267
|
152
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lotA0
|
Pressure100TorrManometer_STEP_MEAN
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RecipeC0
|
WaferB8
| 7
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2023-01-01 01:29:54.267
|
153
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lotA0
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UPC1-Flow_STEP_MEAN
| 85.107423
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RecipeC0
|
WaferB8
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2023-01-01 01:29:54.267
|
154
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
|
WaferB8
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2023-01-01 01:29:55.286
|
155
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
|
WaferB8
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2023-01-01 01:29:55.286
|
156
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lotA0
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MFCNFlow_STEP_MEAN
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RecipeC0
|
WaferB9
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2023-01-01 01:31:06.273
|
157
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lotA0
|
MFCKFlow_STEP_MEAN
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RecipeC0
|
WaferB9
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2023-01-01 01:31:06.273
|
158
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lotA0
|
MFCJFlow_STEP_MEAN
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RecipeC0
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WaferB9
| 10
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2023-01-01 01:31:06.273
|
159
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lotA0
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MFCEFlow_STEP_MEAN
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RecipeC0
|
WaferB9
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2023-01-01 01:31:06.273
|
160
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
|
WaferB9
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2023-01-01 01:31:06.273
|
161
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lotA0
|
MFCGFlow_STEP_MEAN
| 74.99871
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RecipeC0
|
WaferB9
| 10
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2023-01-01 01:31:06.273
|
162
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lotA0
|
MFC5Flow_STEP_MEAN
| 81.066016
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RecipeC0
|
WaferB9
| 10
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2023-01-01 01:31:06.273
|
163
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lotA0
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MFCXFlow_STEP_MEAN
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RecipeC0
|
WaferB9
| 10
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2023-01-01 01:31:06.273
|
164
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lotA0
|
MFC2Flow_STEP_MEAN
| 75.234618
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RecipeC0
|
WaferB9
| 10
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2023-01-01 01:31:06.273
|
165
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lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.000072
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RecipeC0
|
WaferB9
| 10
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2023-01-01 01:31:06.273
|
166
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lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.939508
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RecipeC0
|
WaferB9
| 10
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2023-01-01 01:31:06.273
|
167
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lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.985
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RecipeC0
|
WaferB9
| 7
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2023-01-01 01:31:12.263
|
168
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lotA0
|
UPC1-Flow_STEP_MEAN
| 125.610352
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RecipeC0
|
WaferB9
| 7
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2023-01-01 01:31:12.263
|
169
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lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.975098
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RecipeC0
|
WaferB9
| 7
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2023-01-01 01:31:12.263
|
170
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lotA0
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC0
|
WaferB9
| 8
|
2023-01-01 01:31:13.303
|
171
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC0
|
WaferB9
| 8
|
2023-01-01 01:31:13.303
|
172
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.050699
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RecipeC0
|
WaferB10
| 10
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2023-01-01 01:32:24.273
|
173
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.050699
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RecipeC0
|
WaferB10
| 10
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2023-01-01 01:32:24.273
|
174
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lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.930164
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RecipeC0
|
WaferB10
| 10
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2023-01-01 01:32:24.273
|
175
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.95386
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RecipeC0
|
WaferB10
| 10
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2023-01-01 01:32:24.273
|
176
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 659.936126
|
RecipeC0
|
WaferB10
| 10
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2023-01-01 01:32:24.273
|
177
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.998631
|
RecipeC0
|
WaferB10
| 10
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2023-01-01 01:32:24.273
|
178
|
lotA0
|
MFCGFlow_STEP_MEAN
| 74.99871
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RecipeC0
|
WaferB10
| 10
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2023-01-01 01:32:24.273
|
179
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lotA0
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC0
|
WaferB10
| 10
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2023-01-01 01:32:24.273
|
180
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.029754
|
RecipeC0
|
WaferB10
| 10
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2023-01-01 01:32:24.273
|
181
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.072393
|
RecipeC0
|
WaferB10
| 10
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2023-01-01 01:32:24.273
|
182
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.086028
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RecipeC0
|
WaferB10
| 10
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2023-01-01 01:32:24.273
|
183
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 669.72657
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RecipeC0
|
WaferB10
| 1
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2023-01-01 01:32:25.260
|
184
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 25.664062
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RecipeC0
|
WaferB10
| 7
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2023-01-01 01:32:30.270
|
185
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.94
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RecipeC0
|
WaferB10
| 7
|
2023-01-01 01:32:30.270
|
186
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.972168
|
RecipeC0
|
WaferB10
| 7
|
2023-01-01 01:32:30.270
|
187
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.004395
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RecipeC0
|
WaferB10
| 8
|
2023-01-01 01:32:31.500
|
188
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.515625
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RecipeC0
|
WaferB10
| 8
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2023-01-01 01:32:31.500
|
189
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 3.076172
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RecipeC0
|
WaferB11
| 9
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2023-01-01 01:32:41.270
|
190
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lotA0
|
MFCJFlow_STEP_MEAN
| 60.053792
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RecipeC0
|
WaferB11
| 10
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2023-01-01 01:33:42.267
|
191
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.936066
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RecipeC0
|
WaferB11
| 10
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2023-01-01 01:33:42.267
|
192
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lotA0
|
MFC2Flow_STEP_MEAN
| 75.043213
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RecipeC0
|
WaferB11
| 10
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2023-01-01 01:33:42.267
|
193
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lotA0
|
MFCNFlow_STEP_MEAN
| 134.95386
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RecipeC0
|
WaferB11
| 10
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2023-01-01 01:33:42.267
|
194
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lotA0
|
MFC5Flow_STEP_MEAN
| 81.072393
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RecipeC0
|
WaferB11
| 10
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2023-01-01 01:33:42.267
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195
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lotA0
|
MFCKFlow_STEP_MEAN
| 60.049153
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RecipeC0
|
WaferB11
| 10
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2023-01-01 01:33:42.267
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196
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lotA0
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MFCXFlow_STEP_MEAN
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RecipeC0
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WaferB11
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2023-01-01 01:33:42.267
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197
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB11
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2023-01-01 01:33:42.267
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198
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lotA0
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MFCEFlow_STEP_MEAN
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RecipeC0
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WaferB11
| 10
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2023-01-01 01:33:42.267
|
199
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB11
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2023-01-01 01:33:42.267
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