Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
| sum_dtts
stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
300
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB17
| 10
|
2023-01-01 01:41:31.272
|
301
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 661.773183
|
RecipeC0
|
WaferB17
| 10
|
2023-01-01 01:41:31.272
|
302
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.050632
|
RecipeC0
|
WaferB17
| 10
|
2023-01-01 01:41:31.272
|
303
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.086028
|
RecipeC0
|
WaferB17
| 10
|
2023-01-01 01:41:31.272
|
304
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 669.72657
|
RecipeC0
|
WaferB17
| 12
|
2023-01-01 01:41:32.270
|
305
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.978027
|
RecipeC0
|
WaferB17
| 7
|
2023-01-01 01:41:37.260
|
306
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB17
| 7
|
2023-01-01 01:41:37.260
|
307
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 45.263672
|
RecipeC0
|
WaferB17
| 7
|
2023-01-01 01:41:37.260
|
308
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC0
|
WaferB17
| 8
|
2023-01-01 01:41:38.449
|
309
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.989746
|
RecipeC0
|
WaferB17
| 8
|
2023-01-01 01:41:38.449
|
310
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.072755
|
RecipeC0
|
WaferB18
| 10
|
2023-01-01 01:42:49.337
|
311
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.902
|
RecipeC0
|
WaferB18
| 10
|
2023-01-01 01:42:49.337
|
312
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.925738
|
RecipeC0
|
WaferB18
| 10
|
2023-01-01 01:42:49.337
|
313
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.073776
|
RecipeC0
|
WaferB18
| 10
|
2023-01-01 01:42:49.337
|
314
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.016296
|
RecipeC0
|
WaferB18
| 10
|
2023-01-01 01:42:49.337
|
315
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.056884
|
RecipeC0
|
WaferB18
| 10
|
2023-01-01 01:42:49.337
|
316
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC0
|
WaferB18
| 10
|
2023-01-01 01:42:49.337
|
317
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.997551
|
RecipeC0
|
WaferB18
| 10
|
2023-01-01 01:42:49.337
|
318
|
lotA0
|
MFCGFlow_STEP_MEAN
| 75.007323
|
RecipeC0
|
WaferB18
| 10
|
2023-01-01 01:42:49.337
|
319
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC0
|
WaferB18
| 10
|
2023-01-01 01:42:49.337
|
320
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 659.25173
|
RecipeC0
|
WaferB18
| 10
|
2023-01-01 01:42:49.337
|
321
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 669.72657
|
RecipeC0
|
WaferB18
| 1
|
2023-01-01 01:42:50.267
|
322
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB18
| 7
|
2023-01-01 01:42:55.267
|
323
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.963379
|
RecipeC0
|
WaferB18
| 7
|
2023-01-01 01:42:55.267
|
324
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 28.476563
|
RecipeC0
|
WaferB18
| 7
|
2023-01-01 01:42:55.267
|
325
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC0
|
WaferB18
| 8
|
2023-01-01 01:42:56.466
|
326
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.960449
|
RecipeC0
|
WaferB18
| 8
|
2023-01-01 01:42:56.466
|
327
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.960164
|
RecipeC0
|
WaferB19
| 10
|
2023-01-01 01:44:07.357
|
328
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.056884
|
RecipeC0
|
WaferB19
| 10
|
2023-01-01 01:44:07.357
|
329
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.004034
|
RecipeC0
|
WaferB19
| 10
|
2023-01-01 01:44:07.357
|
330
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0.002274
|
RecipeC0
|
WaferB19
| 10
|
2023-01-01 01:44:07.357
|
331
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.162841
|
RecipeC0
|
WaferB19
| 10
|
2023-01-01 01:44:07.357
|
332
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.068263
|
RecipeC0
|
WaferB19
| 10
|
2023-01-01 01:44:07.357
|
333
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.063848
|
RecipeC0
|
WaferB19
| 10
|
2023-01-01 01:44:07.357
|
334
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC0
|
WaferB19
| 10
|
2023-01-01 01:44:07.357
|
335
|
lotA0
|
MFCGFlow_STEP_MEAN
| 75.001581
|
RecipeC0
|
WaferB19
| 10
|
2023-01-01 01:44:07.357
|
336
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 660.735787
|
RecipeC0
|
WaferB19
| 10
|
2023-01-01 01:44:07.357
|
337
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.898295
|
RecipeC0
|
WaferB19
| 10
|
2023-01-01 01:44:07.357
|
338
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 26.015625
|
RecipeC0
|
WaferB19
| 7
|
2023-01-01 01:44:13.266
|
339
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB19
| 7
|
2023-01-01 01:44:13.266
|
340
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.989746
|
RecipeC0
|
WaferB19
| 7
|
2023-01-01 01:44:13.266
|
341
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -4.394531
|
RecipeC0
|
WaferB19
| 8
|
2023-01-01 01:44:14.414
|
342
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.960449
|
RecipeC0
|
WaferB19
| 8
|
2023-01-01 01:44:14.414
|
343
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.072755
|
RecipeC0
|
WaferB20
| 10
|
2023-01-01 01:45:25.271
|
344
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.06377
|
RecipeC0
|
WaferB20
| 10
|
2023-01-01 01:45:25.271
|
345
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.129346
|
RecipeC0
|
WaferB20
| 10
|
2023-01-01 01:45:25.271
|
346
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.932248
|
RecipeC0
|
WaferB20
| 10
|
2023-01-01 01:45:25.271
|
347
|
lotA0
|
MFCGFlow_STEP_MEAN
| 75.001581
|
RecipeC0
|
WaferB20
| 10
|
2023-01-01 01:45:25.271
|
348
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 660.440415
|
RecipeC0
|
WaferB20
| 10
|
2023-01-01 01:45:25.271
|
349
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC0
|
WaferB20
| 10
|
2023-01-01 01:45:25.271
|
350
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.001753
|
RecipeC0
|
WaferB20
| 10
|
2023-01-01 01:45:25.271
|
351
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.927213
|
RecipeC0
|
WaferB20
| 10
|
2023-01-01 01:45:25.271
|
352
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.056884
|
RecipeC0
|
WaferB20
| 10
|
2023-01-01 01:45:25.271
|
353
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0.00447
|
RecipeC0
|
WaferB20
| 10
|
2023-01-01 01:45:25.271
|
354
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 669.72657
|
RecipeC0
|
WaferB20
| 12
|
2023-01-01 01:45:26.261
|
355
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 33.134766
|
RecipeC0
|
WaferB20
| 7
|
2023-01-01 01:45:31.271
|
356
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC0
|
WaferB20
| 7
|
2023-01-01 01:45:31.271
|
357
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.970703
|
RecipeC0
|
WaferB20
| 7
|
2023-01-01 01:45:31.271
|
358
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.982422
|
RecipeC0
|
WaferB20
| 8
|
2023-01-01 01:45:32.264
|
359
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC0
|
WaferB20
| 8
|
2023-01-01 01:45:32.264
|
360
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.070819
|
RecipeC0
|
WaferB21
| 10
|
2023-01-01 01:46:43.268
|
361
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 658.891522
|
RecipeC0
|
WaferB21
| 10
|
2023-01-01 01:46:43.268
|
362
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.04912
|
RecipeC0
|
WaferB21
| 10
|
2023-01-01 01:46:43.268
|
363
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.979786
|
RecipeC0
|
WaferB21
| 10
|
2023-01-01 01:46:43.268
|
364
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.183179
|
RecipeC0
|
WaferB21
| 10
|
2023-01-01 01:46:43.268
|
365
|
lotA0
|
MFCGFlow_STEP_MEAN
| 75.001581
|
RecipeC0
|
WaferB21
| 10
|
2023-01-01 01:46:43.268
|
366
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.93459
|
RecipeC0
|
WaferB21
| 10
|
2023-01-01 01:46:43.268
|
367
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.061524
|
RecipeC0
|
WaferB21
| 10
|
2023-01-01 01:46:43.268
|
368
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.999832
|
RecipeC0
|
WaferB21
| 10
|
2023-01-01 01:46:43.268
|
369
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0.002274
|
RecipeC0
|
WaferB21
| 10
|
2023-01-01 01:46:43.268
|
370
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.058195
|
RecipeC0
|
WaferB21
| 10
|
2023-01-01 01:46:43.268
|
371
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB21
| 7
|
2023-01-01 01:46:49.270
|
372
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.017822
|
RecipeC0
|
WaferB21
| 7
|
2023-01-01 01:46:49.270
|
373
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 112.426759
|
RecipeC0
|
WaferB21
| 7
|
2023-01-01 01:46:49.270
|
374
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.967774
|
RecipeC0
|
WaferB21
| 8
|
2023-01-01 01:46:50.268
|
375
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC0
|
WaferB21
| 8
|
2023-01-01 01:46:50.268
|
376
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB22
| 10
|
2023-01-01 01:48:01.385
|
377
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.050632
|
RecipeC0
|
WaferB22
| 10
|
2023-01-01 01:48:01.385
|
378
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.946885
|
RecipeC0
|
WaferB22
| 10
|
2023-01-01 01:48:01.385
|
379
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC0
|
WaferB22
| 10
|
2023-01-01 01:48:01.385
|
380
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 658.999586
|
RecipeC0
|
WaferB22
| 10
|
2023-01-01 01:48:01.385
|
381
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.000312
|
RecipeC0
|
WaferB22
| 10
|
2023-01-01 01:48:01.385
|
382
|
lotA0
|
MFCGFlow_STEP_MEAN
| 74.992968
|
RecipeC0
|
WaferB22
| 10
|
2023-01-01 01:48:01.385
|
383
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC0
|
WaferB22
| 10
|
2023-01-01 01:48:01.385
|
384
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.031249
|
RecipeC0
|
WaferB22
| 10
|
2023-01-01 01:48:01.385
|
385
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.070219
|
RecipeC0
|
WaferB22
| 10
|
2023-01-01 01:48:01.385
|
386
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.06765
|
RecipeC0
|
WaferB22
| 10
|
2023-01-01 01:48:01.385
|
387
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 23.027343
|
RecipeC0
|
WaferB22
| 7
|
2023-01-01 01:48:07.267
|
388
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 6
|
RecipeC0
|
WaferB22
| 7
|
2023-01-01 01:48:07.267
|
389
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.985352
|
RecipeC0
|
WaferB22
| 7
|
2023-01-01 01:48:07.267
|
390
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.735352
|
RecipeC0
|
WaferB22
| 8
|
2023-01-01 01:48:09.265
|
391
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.008057
|
RecipeC0
|
WaferB22
| 8
|
2023-01-01 01:48:09.265
|
392
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 3.076172
|
RecipeC0
|
WaferB23
| 9
|
2023-01-01 01:48:19.273
|
393
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC0
|
WaferB23
| 10
|
2023-01-01 01:49:20.272
|
394
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.999111
|
RecipeC0
|
WaferB23
| 10
|
2023-01-01 01:49:20.272
|
395
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.05517
|
RecipeC0
|
WaferB23
| 10
|
2023-01-01 01:49:20.272
|
396
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.007324
|
RecipeC0
|
WaferB23
| 10
|
2023-01-01 01:49:20.272
|
397
|
lotA0
|
MFCGFlow_STEP_MEAN
| 75.001581
|
RecipeC0
|
WaferB23
| 10
|
2023-01-01 01:49:20.272
|
398
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 663.45175
|
RecipeC0
|
WaferB23
| 10
|
2023-01-01 01:49:20.272
|
399
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC0
|
WaferB23
| 10
|
2023-01-01 01:49:20.272
|
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